Products

Plasma
Sensor

High-precision plasma monitoring sensors providing real-time measurement of plasma parameters with sub-millisecond response time.

10 Msps

Sampling Rate

4 CH

Simultaneous Channels

Real-time

Process Diagnostics

Plasmon Series

High-Speed Arc Monitoring System

Optical Emission Monitoring

Real-time optical emission spectroscopy for plasma state characterization and process stability tracking.

Plasma Stability Analysis

Continuous analysis of plasma uniformity and stability to ensure consistent process conditions across the chamber.

Arc Detection

Ultra-fast arc event detection with microsecond-level response to protect equipment and prevent process excursions.

Real-time Process Diagnostics

Integrated diagnostics dashboard providing live process health metrics and anomaly alerts for smart manufacturing.

Applications

PECVD

Plasma-Enhanced
Chemical Vapor Deposition

Etch

Plasma Etch
& Dry Strip Processes

PVD

Physical Vapor
Deposition (Sputtering)